The semiconductor industry is making noticeable progress on the development of advanced curvilinear photomasks, a technology that has broad implications for chip designs at the most advanced nodes and ...
Concept of mask/wafer co-optimization by moving the shot with mask and wafer double simulation to minimize wafer error. VSB shot configurations and its corresponding ...
Scientists at the Fraunhofer Institute for Laser Technology (ILT) have devised a striking new addition to contact stamping technologies in the recently-completed ERDF research project “ScanCut”. In ...
Photonics giant Hamamatsu and research hub Fraunhofer Institute for Laser Technology (ILT) have announced the formation of an application lab designed specifically for advanced laser material ...